长沙理工大学学报(自然科学版)
单晶GaN纳米力学性能与切削特性试验研究
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(长沙理工大学 机械装备高性能智能制造关键技术湖南省重点实验室,湖南 长沙 410114)

作者简介:

通讯作者:

唐昆(1980—)(ORCID:0000-0002-6651-240X),男,副教授,主要从事超精密加工及热压成形方面的研究。E-mail:tangkun@csust.edu.cn

中图分类号:

TM23

基金项目:

国家自然科学基金资助项目(51405034、51605045、51875050);湖南省教育厅科学研究项目(19B011);湖南省高新技术产业科技创新引领计划项目(2022GK4027)


Experimental study on nano-mechanical properties and cutting characteristics of single crystal GaN
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(Hunan Provincial Key Laboratory of Intelligent Manufacturing Technology for High-Performance Mechanical Equipment, Changsha University of Science & Technology, Changsha 410114, China)

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    摘要:

    【目的】研究单晶GaN微纳米量级下的力学性能与切削特性,为微纳制造提供理论基础和数据支撑,也为半导体硬脆材料的超精密加工提供技术依据。【方法】通过纳米压入和变载、恒载纳米刻划试验,研究单晶GaN的纳米力学性能,分析其在变载纳米刻划过程中的材料去除机制,探讨恒载刻划参数对材料表面切削特性的影响。【结果】单晶GaN的硬度和弹性模量的均值分别为6.06、92.90 GPa,弹性回复率和弹性能回复率均随压入载荷的增加而降低;材料弹塑性转变与脆塑性转变的临界载荷分别约为390、1 200 mN;切削力与摩擦系数均随刻划速度、法向载荷的增加而增大。【结论】在390~1 200 mN法向载荷加载范围内,单晶GaN能够被塑性域去除,减少刻划过程中的脆性断裂损伤,提高加工表面的质量。

    Abstract:

    [Purposes] This paper aims to study the mechanical properties and cutting characteristics of single crystal GaN at the micro-nano scale, which provides theoretical basis and data support for its micro-nano fabrication, and also offers a technical basis for ultra-precision processing of semiconductor hard and brittle materials. [Methods] The mechanical properties of single crystal GaN were studied by nanoindentation. The process of material removal and influence of constant load scratch parameters on the cutting characteristics were also analyzed by nano-scratch test under variable and constant load respectively. [Findings] The average hardness and elastic modulus of single crystal GaN were 6.06 and 92.90 GPa, respectively, and the elastic recovery rate and elastic energy recovery rate decreased with the increasing of pressing load. The critical loads of elastic-plastic transition and brittle-plastic transition were about 390 and 1 200 mN, respectively. The cutting force and friction coefficient increased with the increasing of cutting speed and normal load. [Conclusions] In the normal loading range of 390~1 200 mN, the ductile removal of single crystal GaN can be achieved. The reduction of brittle fracture damage in the process of scratching and improvement of machined surface quality also can be obtained.

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唐昆,梁杰,张先源,等.单晶GaN纳米力学性能与切削特性试验研究[J].长沙理工大学学报(自然科学版),2023,20(6):119-127.
TANG Kun, LIANG Jie, ZHANG Xianyuan, et al. Experimental study on nano-mechanical properties and cutting characteristics of single crystal GaN[J]. Journal of Changsha University of Science & Technology (Natural Science),2023,20(6):119-127.

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  • 收稿日期:2022-01-14
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  • 在线发布日期: 2024-01-17
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